Amtech, a supplier of diffusion furnace equipment in Tempe ... KSEC, a subsidiary of Hitachi Kokusai Electric Inc., a supplier of vertical and single-wafer diffusion and LPCVD systems. As a part of ...

ASM's original A400 vertical furnace system has a proven track record ... processes like doped silicon and silicon nitride films, diffusion processes such as wet oxidation and anneal processes.